Scanning electron microscope with SE, BSE, in-beam SE, EDX and WDX detectors.
Field Emission Gun (Schottky Emitter) catode with accelerating voltage 0.05 - 30 kV,
Resolution in high-vacuum mode
SE
1.2 nm at 30 keV
2.5 nm at 3 keV
In-Beam SE
1.0 nm at 30 keV
Resolution in low-vacuum mode
BSE
2.0 nm at 30 keV
EDX and WDX detectors
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